PREPARATION OF LEAD-ZIRCONATE-TITANATE THIN-FILMS BY REACTIVE EVAPORATION

被引：18
|
作者：
TORII, K
SAITOH, S
OHJI, Y
机构：
[1] Central Research Laboratory, Hitachi, Ltd, Kokubunji, Tokyo
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 9B期
关键词：
FERROELECTRIC; REACTIVE EVAPORATION; THIN FILM; DIELECTRIC CONSTANT; OZONE; LEAKAGE CURRENT;
D O I：
10.1143/JJAP.33.5287
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Lead zirconate titanate thin films have been successfully fabricated by reactive evaporation. Elemental Pb, Zr, and Ti were evaporated in ozone-oxygen mixture ambient. Excellent controls of uniformity of thickness and composition were achieved over a large area (within +/-2% on 4-inch wafer). The electrical properties were examined as a function of Pb content in the films. High dielectric constant (epsilon similar to 1000) and low leakage current (1.7x10(-7) A/cm(2)) were realized for the film with stoichiometric composition.
引用
收藏
页码：5287 / 5290
页数：4
相关论文
共 50 条
  • [21] CRYSTALLIZATION OF SOL-GEL DERIVED LEAD-ZIRCONATE-TITANATE THIN-FILMS IN ARGON AND OXYGEN ATMOSPHERES
    BURSILL, LA
    BROOKS, KG
    JOURNAL OF APPLIED PHYSICS, 1994, 75 (09) : 4501 - 4509
  • [22] LIGHT-SCATTERING FROM SOL-GEL PROCESSED LEAD-ZIRCONATE-TITANATE THIN-FILMS
    SINCLAIR, MB
    DIMOS, D
    POTTER, BG
    SCHWARTZ, RW
    INTEGRATED FERROELECTRICS, 1995, 7 (1-4) : 225 - 236
  • [23] Microstructural characterization of sol-gel lead-zirconate-titanate thin films
    Impey, SA
    Huang, Z
    Patel, A
    Beanland, R
    Shorrocks, NM
    Watton, R
    Whatmore, RW
    JOURNAL OF APPLIED PHYSICS, 1998, 83 (04) : 2202 - 2208
  • [24] Pulsed laser deposition of lead-zirconate-titanate thin films and multilayered heterostructures
    T.J. Zhu
    L. Lu
    M.O. Lai
    Applied Physics A, 2005, 81 : 701 - 714
  • [25] Pulsed laser deposition of lead-zirconate-titanate thin films and multilayered heterostructures
    Zhu, TJ
    Lu, L
    Lai, MO
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 81 (04): : 701 - 714
  • [26] Printed Lead-Zirconate-Titanate Thin Films for Hard Disk Drive Applications
    Xu, Weiwei
    Cao, G. Z.
    Shen, I. Y.
    2018 ASIA-PACIFIC MAGNETIC RECORDING CONFERENCE (APMRC), 2018,
  • [27] EXCIMER LASER ABLATED LEAD ZIRCONATE TITANATE THIN-FILMS
    ROY, D
    KRUPANIDHI, SB
    DOUGHERTY, JP
    JOURNAL OF APPLIED PHYSICS, 1991, 69 (11) : 7930 - 7932
  • [28] Preparation of lead zirconate titanate thin films by reactive magnetron co-sputtering
    Yamakawa, K
    TrolierMcKinstry, S
    Dougherty, JP
    MATERIALS LETTERS, 1996, 28 (4-6) : 317 - 322
  • [29] EXAMINATION OF BARRIER LAYERS FOR LEAD ZIRCONATE TITANATE THIN-FILMS
    MADSEN, LD
    WEAVER, L
    JOURNAL OF ELECTRONIC MATERIALS, 1992, 21 (01) : 93 - 97
  • [30] PYROCHLORE TO PEROVSKITE PHASE-TRANSFORMATION IN SOL-GEL DERIVED LEAD-ZIRCONATE-TITANATE THIN-FILMS
    KWOK, CK
    DESU, SB
    APPLIED PHYSICS LETTERS, 1992, 60 (12) : 1430 - 1432
12345