EVIDENCE FOR FREE CARBON IN AMORPHOUS OMCVD SILICON-RICH SIXC1-X COATINGS

被引:4
|
作者
MESTARI, A
MAURY, F
MORANCHO, R
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来源
JOURNAL DE PHYSIQUE | 1989年 / 50卷 / C-5期
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D O I
10.1051/jphyscol:1989592
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页码:765 / 772
页数:8
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