CHARACTERIZATION OF DEFECTS IN LIQUID-PHASE EPITAXIAL INP AND INGAASP CRYSTALS BY SCANNING ELECTRON-MICROSCOPY AND ELECTRON-BEAM INDUCED CURRENT METHOD

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UEDA, O
UMEBU, I
YAMAZAKI, S
OINUMA, K
KANEDA, T
KOTANI, T
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JOURNAL OF ELECTRON MICROSCOPY | 1984年 / 33卷 / 01期
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TH742 [显微镜];
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页码:1 / 9
页数:9
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