CHARACTERIZATION OF DEFECTS IN LIQUID-PHASE EPITAXIAL INP AND INGAASP CRYSTALS BY SCANNING ELECTRON-MICROSCOPY AND ELECTRON-BEAM INDUCED CURRENT METHOD

被引:0
|
作者
UEDA, O
UMEBU, I
YAMAZAKI, S
OINUMA, K
KANEDA, T
KOTANI, T
机构
来源
JOURNAL OF ELECTRON MICROSCOPY | 1984年 / 33卷 / 01期
关键词
D O I
暂无
中图分类号
TH742 [显微镜];
学科分类号
摘要
引用
收藏
页码:1 / 9
页数:9
相关论文
共 50 条
  • [1] CHARACTERIZATION OF LIQUID-PHASE EPITAXIAL QUATERNARY LASERS BY EBIC MODE SCANNING ELECTRON-MICROSCOPY
    LEVIN, ER
    LADANY, I
    THIN SOLID FILMS, 1982, 90 (04) : 372 - 372
  • [2] SCANNING ELECTRON-MICROSCOPY AND RELATED ELECTRON-BEAM TECHNIQUES IN IC TECHNOLOGY
    BINDELL, JB
    SOLID STATE TECHNOLOGY, 1975, 18 (04) : 45 - 50
  • [3] ELECTRON-BEAM DAMAGE IN SCANNING ELECTRON-MICROSCOPY OF WORN ELASTOMER SURFACES
    ARNOLD, JC
    HUTCHINGS, IM
    WEAR, 1988, 128 (03) : 339 - 342
  • [4] Accessing local electron-beam induced temperature changes during in situ liquid-phase transmission electron microscopy
    Fritsch, Birk
    Hutzler, Andreas
    Wu, Mingjian
    Khadivianazar, Saba
    Vogl, Lilian
    Jank, Michael P. M.
    Maerz, Martin
    Spiecker, Erdmann
    NANOSCALE ADVANCES, 2021, 3 (09): : 2466 - 2474
  • [5] QUANTITATIVE CHARACTERIZATION OF SEMICONDUCTOR DEFECTS BY ELECTRON-BEAM INDUCED CURRENT
    DONOLATO, C
    POINT AND EXTENDED DEFECTS IN SEMICONDUCTORS, 1989, 202 : 225 - 241
  • [6] FLUORESCENCE OF ELECTRON-BEAM INDUCED CURRENT TO THE CHARACTERIZATION OF DEFECTS IN SEMICONDUCTORS CIRCUITS
    DOMINE, G
    JOURNAL DE MICROSCOPIE ET DE SPECTROSCOPIE ELECTRONIQUES, 1981, 6 (01): : 71 - 76
  • [7] CURRENT CONTROLLED LIQUID-PHASE EPITAXIAL-GROWTH AND CHARACTERIZATION OF INGAASP
    IYER, S
    STEFANAKOS, EK
    ABULFADL, A
    COLLIS, WJ
    JOURNAL OF CRYSTAL GROWTH, 1984, 70 (1-2) : 162 - 168
  • [8] SCANNING ELECTRON-MICROSCOPY USING BEAM INDUCED CURRENTS
    GULDBERG, J
    SCANDINAVIAN JOURNAL OF METALLURGY, 1977, 6 (01) : 9 - 9
  • [9] TRANSMISSION ELECTRON-MICROSCOPY OF LIQUID-PHASE DENSIFIED SIC
    CARPENTER, RW
    BRAUE, W
    CUTLER, RA
    JOURNAL OF MATERIALS RESEARCH, 1991, 6 (09) : 1937 - 1944
  • [10] OBSERVATIONS OF ELECTRICALLY ACTIVE DEFECTS IN EPITAXIAL COMPOSITIONS AND THEIR DEVICES, USING THE METHODS OF TRANSMITTING ELECTRON-MICROSCOPY AND SCANNING ELECTRON-MICROSCOPY
    MILVIDSKII, MG
    MORGULIS, LM
    SHIFRIN, SS
    IZVESTIYA AKADEMII NAUK SSSR SERIYA FIZICHESKAYA, 1980, 44 (10): : 2212 - 2216