THE TEMPERATURE-DEPENDENT DIFFUSION MECHANISM OF ZN IN INP USING THE SEMICLOSED DIFFUSION METHOD

被引：40
|
作者：
KAZMIERSKI, K [1 ]
HUBER, AM [1 ]
MORILLOT, G [1 ]
DECREMOUX, B [1 ]
机构：
[1] THOMSON CSF,CENT RECH LAB,F-91401 ORSAY,FRANCE
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1984年 / 23卷 / 05期
关键词：
D O I：
10.1143/JJAP.23.628
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：628 / 633
页数：6
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