THE TEMPERATURE-DEPENDENT DIFFUSION MECHANISM OF ZN IN INP USING THE SEMICLOSED DIFFUSION METHOD

被引:40
|
作者
KAZMIERSKI, K [1 ]
HUBER, AM [1 ]
MORILLOT, G [1 ]
DECREMOUX, B [1 ]
机构
[1] THOMSON CSF,CENT RECH LAB,F-91401 ORSAY,FRANCE
关键词
D O I
10.1143/JJAP.23.628
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:628 / 633
页数:6
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