APPLICATION OF AC MAGNETIC-FIELD COMPENSATION TO A SCANNING ELECTRON-MICROSCOPE

被引：2
|
作者：
GEMPERLE, A [1 ]
NOVAK, J [1 ]
机构：
[1] CZECHOSLOVAK ACAD SCI, PRAGUE, CZECHOSLOVAKIA
来源：
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1976年 / 9卷 / 06期
关键词：
D O I：
10.1088/0022-3735/9/6/020
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：490 / 495
页数：6
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