SE DOPING MECHANISMS IN MOCVD GAAS-LAYERS

被引:10
|
作者
ASAI, H
SUGIURA, H
机构
关键词
D O I
10.1143/JJAP.24.L815
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:L815 / L817
页数:3
相关论文
共 50 条
  • [1] Se DOPING MECHANISMS IN MOCVD GaAs LAYERS.
    Asai, Hiromitsu
    Sugiura, Hideo
    1600, (24):
  • [2] ZINC DOPING OF GAAS-LAYERS GROWN IN A CHLORIDE PROCESS
    DYAKONOV, LI
    IVLEV, VN
    LIPATOVA, NI
    DEMENKOV, NM
    INORGANIC MATERIALS, 1989, 25 (02) : 172 - 175
  • [3] GROWTH OF HIGH-QUALITY GAAS-LAYERS ON SI SUBSTRATES BY MOCVD
    AKIYAMA, M
    KAWARADA, Y
    UEDA, T
    NISHI, S
    KAMINISHI, K
    JOURNAL OF CRYSTAL GROWTH, 1986, 77 (1-3) : 490 - 497
  • [4] MISFIT AND THREADING DISLOCATIONS IN GAAS-LAYERS GROWN ON SI SUBSTRATES BY MOCVD
    ISHIDA, K
    AKIYAMA, M
    NISHI, S
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1987, 26 (03): : L163 - L165
  • [5] LOW-TEMPERATURE GROWTH OF MOCVD GAAS-LAYERS AT ATMOSPHERIC-PRESSURE
    ESCOBOSA, A
    KRAUTLE, H
    BENEKING, H
    JOURNAL OF CRYSTAL GROWTH, 1982, 57 (03) : 605 - 606
  • [6] LATERAL AND VERTICAL ISOLATION BY ARSENIC IMPLANTATION INTO MOCVD-GROWN GAAS-LAYERS
    NAMAVAR, F
    KALKHORAN, NM
    CLAVERIE, A
    LILIENTALWEBER, Z
    WEBER, ER
    SEKULAMOISE, PA
    VERNON, S
    HAVEN, V
    JOURNAL OF ELECTRONIC MATERIALS, 1993, 22 (12) : 1409 - 1412
  • [7] DIFFUSION-MODEL FOR DEPOSITION OF EPITAXIAL GAAS-LAYERS PREPARED BY THE MOCVD METHOD
    LEITNER, J
    VONKA, P
    STEJSKAL, J
    KLIMA, P
    HLADINA, R
    COLLECTION OF CZECHOSLOVAK CHEMICAL COMMUNICATIONS, 1991, 56 (10) : 2020 - 2029
  • [8] THE INFLUENCE OF ISOVALENT IMPURITIES DOPING ON THE DEFECTS FORMATION IN HOMOEPITAXIAL GAAS-LAYERS
    GANINA, NV
    MILVIDSKY, MG
    SHERSHAKOV, AN
    YUGOVA, TG
    KRISTALLOGRAFIYA, 1982, 27 (05): : 1025 - 1027
  • [9] DISTRIBUTION OF DEEP LEVELS IN THE GAAS-LAYERS OF GAAS/ALXGA1-XAS HETEROSTRUCTURES GROWN BY MOCVD
    ALLSOPP, D
    PEAKER, AR
    THRUSH, EJ
    WALEEVANS, G
    JOURNAL OF CRYSTAL GROWTH, 1984, 68 (01) : 295 - 300
  • [10] ONE-STEP GROWTH OF GAAS-LAYERS ON SI SUBSTRATES BY LOW-PRESSURE MOCVD
    SATO, K
    TOGURA, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1990, 29 (10): : L1735 - L1737