SCANNING OPTICAL FIBER MICROSCOPE FOR HIGH-RESOLUTION LASER-BEAM INDUCED CURRENT IMAGE OBSERVATION OF SEMICONDUCTOR DEFECTS

被引：1
|
作者：
OGURA, M
SAKAUE, K
TOKUMARU, Y
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1985年 / 24卷 / 08期
关键词：
D O I：
10.1143/JJAP.24.L617
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：L617 / L619
页数：3
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