ELECTRON AVALANCHE INJECTION ON 10-NM DIELECTRIC FILMS

被引:8
|
作者
DORI, L [1 ]
ARIENZO, M [1 ]
NGUYEN, TN [1 ]
FISCHETTI, MV [1 ]
STEIN, KJ [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
D O I
10.1063/1.338948
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1910 / 1915
页数:6
相关论文
共 50 条
  • [41] Ultra Low Contact Resistivities for CMOS Beyond 10-nm Node
    Zhang, Zhen
    Koswatta, Siyuranga Obasa
    Bedell, Stephen W.
    Baraskar, Ashish
    Guillorn, Michael
    Engelmann, Sebastian U.
    Zhu, Yu
    Gonsalves, Jemima
    Pyzyna, Adam
    Hopstaken, Marinus
    Witt, Christian
    Yang, Li
    Liu, Fei
    Newbury, Joseph
    Song, Wei
    Cabral, Cyril, Jr.
    Lofaro, Michael
    Ozcan, Ahmet S.
    Raymond, Mark
    Lavoie, Christian
    Sleight, Jeffrey W.
    Rodbell, Kenneth P.
    Solomon, Paul M.
    IEEE ELECTRON DEVICE LETTERS, 2013, 34 (06) : 723 - 725
  • [42] HYDRAULIC MATERIALS-TESTING SYSTEM WITH 10-NM POSITIONAL ACCURACY
    NEUMANN, P
    EXPERIMENTAL MECHANICS, 1978, 18 (04) : 152 - 154
  • [43] Gate double patterning strategies for 10-nm node FinFET devices
    Hody, Hubert
    Paraschiv, Vasile
    Hellin, David
    Vandeweyer, Tom
    Boccardi, Guillaume
    Xu, Kaidong
    JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2015, 14 (01):
  • [44] COMPARISON OF 10-NM FILAMENTS FROM 3 BOVINE-TISSUES
    GIPSON, IK
    ANDERSON, RA
    EXPERIMENTAL CELL RESEARCH, 1980, 128 (02) : 395 - 406
  • [45] Circular RF MEMS resonator solutions for 100-nm to 10-nm SOI structures
    Myllymaki, S
    Ristolainen, E
    Heino, P
    Lehto, A
    Varjonen, K
    SMART SENSORS, ACTUATORS, AND MEMS, PTS 1 AND 2, 2003, 5116 : 676 - 681
  • [46] WAFER-LEVEL FABRICATION OF CONFORMAL SUB 10-NM NANOGAPS
    Tope, Sayali
    Noh, Seungbeom
    Kim, Hanseup
    2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS, 2023, : 657 - 660
  • [47] EFFECT OF VANADATE ON INTRACELLULAR-DISTRIBUTION AND FUNCTION OF 10-NM FILAMENTS
    WANG, E
    CHOPPIN, PW
    PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA-BIOLOGICAL SCIENCES, 1981, 78 (04): : 2363 - 2367
  • [48] SRAM cell performance analysis beyond 10-nm FinFET technology
    Ichihashi, Motoi
    Woo, Youngtag
    Parihar, Sanjay
    2016 INTERNATIONAL SYMPOSIUM ON VLSI TECHNOLOGY, SYSTEMS AND APPLICATION (VLSI-TSA), 2016,
  • [49] DIFFERENTIAL RESPONSE OF MYOFIBRILS AND 10-NM FILAMENTS TO A CO-CARCINOGEN
    TOYAMA, Y
    WEST, CM
    HOLTZER, H
    AMERICAN JOURNAL OF ANATOMY, 1979, 156 (01): : 131 - 137
  • [50] RUNNING PATTERN OF 10-NM FILAMENTS IN ASCIDIAN SMOOTH-MUSCLE
    TERAKADO, K
    ZOOLOGICAL SCIENCE, 1987, 4 (06) : 997 - 997