NBN FILMS PREPARED BY MAGNETRON SPUTTERING

被引：11
|
作者：
AKUNE, T
SAKAMOTO, N
SHIBUYA, Y
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1982年 / 21卷 / 05期
关键词：
D O I：
10.1143/JJAP.21.772
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：772 / 775
页数：4
相关论文
共 50 条
  • [31] Microstructure of ZnO:Er Films Prepared by Magnetron Sputtering
    V. F. Gremenok
    Journal of Contemporary Physics (Armenian Academy of Sciences), 2022, 57 : 358 - 362
  • [32] Effect of NbN and ZrN films formed by magnetron sputtering on Ti and porcelain bonding
    Wang, Shu-Shu
    Xia, Yang
    Zhang, La-Bao
    Guang, Han-Bing
    Shen, Ming
    Zhang, Fei-Min
    SURFACE & COATINGS TECHNOLOGY, 2010, 205 (07): : 1886 - 1891
  • [33] Effect of Sputtering Power on the Properties of TaN Thin Films Prepared by the Magnetron Sputtering
    Lu, Qinxin
    Zhang, Xiuqing
    Gu, Liangnan
    Xue, Ninghua
    2016 3RD INTERNATIONAL CONFERENCE ON SMART MATERIALS AND NANOTECHNOLOGY IN ENGINEERING (SMNE 2016), 2016, : 67 - 70
  • [34] Influence of the sputtering pressure on the properties of TAZO films prepared by DC magnetron sputtering
    Liu, Han-fa
    Yuan, Chang-kun
    OPTOELECTRONIC MATERIALS, PTS 1AND 2, 2010, 663-665 : 1045 - 1048
  • [35] Effect of sputtering power on the microstructure and properties of silver films prepared by magnetron sputtering
    Lu, Dashi
    Yang, Junzhe
    Wang, Xiuqi
    Gao, Shang
    Li, Mingyu
    Ji, Hongjun
    MATERIALS TODAY COMMUNICATIONS, 2025, 42
  • [36] Effects of sputtering time on the properties of ZnO thin films prepared by magnetron sputtering
    Pan, Chen
    Zhao, Zhiwei
    Wang, Chao
    2015 IEEE INTERNATIONAL VACUUM ELECTRONICS CONFERENCE (IVEC), 2015,
  • [37] Microstructure and tribological properties of NbN-Ag composite films by reactive magnetron sputtering
    Ju, Hongbo
    Xu, Junhua
    APPLIED SURFACE SCIENCE, 2015, 355 : 878 - 883
  • [38] Morphological, structural and mechanical properties of NbN thin films deposited by reactive magnetron sputtering
    Sandu, CS
    Benkahoul, M
    Parlinska-Wojtan, M
    Sanjinés, R
    Lévy, F
    SURFACE & COATINGS TECHNOLOGY, 2006, 200 (22-23): : 6544 - 6548
  • [39] An investigation of structure and wear properties of TiN/NbN films deposited by reactive magnetron sputtering
    Chien-Cheng Liu
    Weng Min-Hang
    Chien-Tang-Wang
    Chen Jheng-Hong
    Chou Yung-Chih
    Yaw Huai-Wei
    HIGH-PERFORMANCE CERAMICS V, PTS 1 AND 2, 2008, 368-372 : 1310 - +
  • [40] Transparent and conductive multicomponent oxide films prepared by magnetron sputtering
    Minami, T
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1999, 17 (04): : 1765 - 1772
12345