IMPURITY PROFILES OF GAAS EPITAXIAL LAYERS DOPED WITH SN, SI, AND GE GROWN WITH MOLECULAR-BEAM EPITAXY

被引:153
作者
CHO, AY [1 ]
机构
[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974
关键词
D O I
10.1063/1.321777
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:1733 / 1735
页数:3
相关论文
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