ANGULAR AND ENERGY DEPENDENCIES OF SECONDARY ION EMISSION FROM POLYCRYSTALLINE AND SINGLE-CRYSTAL SURFACES

被引：4
|
作者：
KOSYACHKOV, AA
机构：
[1] Institute of Metal Physics, Acad Sci UkrSSR
来源：
VACUUM | 1991年 / 42卷 / 1-2期
关键词：
D O I：
10.1016/0042-207X(91)90097-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Secondary ion emission (SIE) from clean polycrystalline and single-crystal surfaces bombarded with 1-8 keV Ar+ ions has been investigated using a new spectrometer with high energy, angular and mass resolutions. SIE-dependencies are discussed as a function of Ar+ ion energy and incident angle as well as of the matrix and the resputtered Ar+ secondary ion energy and emission angle. The results obtained are compared with available data on neutral atom sputtering. © 1990.
引用
收藏
页码：143 / 145
页数：3
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