ANGULAR AND ENERGY DEPENDENCIES OF SECONDARY ION EMISSION FROM POLYCRYSTALLINE AND SINGLE-CRYSTAL SURFACES

被引：4

作者：

KOSYACHKOV, AA

机构：

[1] Institute of Metal Physics, Acad Sci UkrSSR

来源：

VACUUM | 1991年 / 42卷 / 1-2期

关键词：

D O I：

10.1016/0042-207X(91)90097-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Secondary ion emission (SIE) from clean polycrystalline and single-crystal surfaces bombarded with 1-8 keV Ar+ ions has been investigated using a new spectrometer with high energy, angular and mass resolutions. SIE-dependencies are discussed as a function of Ar+ ion energy and incident angle as well as of the matrix and the resputtered Ar+ secondary ion energy and emission angle. The results obtained are compared with available data on neutral atom sputtering. © 1990.

引用

页码：143 / 145

页数：3

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