GROWTH OF LARGE-AREA YBA2CU3O7-X FILMS BY ACTIVATED REACTIVE EVAPORATION

被引：2
|
作者：
PRAKASH, S
CHOU, K
DOERR, HJ
DESHPANDEY, CV
BUNSHAH, RF
机构：
[1] Materials Science and Engineering Department, School of Engineering and Applied Science, University of California at Los Angeles, Los Angeles
来源：
THIN SOLID FILMS | 1993年 / 227卷 / 01期
关键词：
D O I：
10.1016/0040-6090(93)90191-Q
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
High-T(c) superconductor thin films have many important properties for microwave frequency passive device applications. However, for device fabrication it is necessary to deposit uniform defect-free films of YBa2Cu3O7-x (YBCO) over large wafer-size areas. The activated reactive evaporation process has been used successfully to grow YBCO films at relatively low temperatures over large areas. The unique features of the process will be discussed over other popular processes with emphasis on film composition, structure and thickness uniformity,
引用
收藏
页码：95 / 99
页数：5
相关论文
共 50 条
  • [41] Characteristics of YBa2Cu3O7-x/SrTiO3/YBa2Cu3O7-x films formed by chemical solution deposition
    Wu, Chuanbao
    Zhao, Gaoyang
    Qiao, Fanyang
    CERAMICS INTERNATIONAL, 2014, 40 (08) : 13145 - 13150
  • [42] Large-area double-side pulsed laser deposition of YBa2Cu3O7-x thin films on 3-in sapphire wafers
    Lorenz, M
    Hochmuth, H
    Natusch, D
    Borner, H
    Lippold, G
    Kreher, K
    Schmitz, W
    APPLIED PHYSICS LETTERS, 1996, 68 (23) : 3332 - 3334
  • [43] Large-area double-side pulsed laser deposition of YBa2Cu3O7-x thin films on 3-in. sapphire wafers
    Universitaet Leipzig, Leipzig, Germany
    Appl Phys Lett, 23 (3332-3334):
  • [44] CRYSTAL-GROWTH OF YBA2CU3O7-X
    SCHEEL, HJ
    LICCI, F
    JOURNAL OF CRYSTAL GROWTH, 1987, 85 (04) : 607 - 614
  • [45] ON THE MECHANISM OF THE GROWTH OF YBA2CU3O7-X CRYSTALS
    ASKHABOV, AM
    MARKOVSKII, GE
    BOGDANOV, GE
    INORGANIC MATERIALS, 1994, 30 (02) : 273 - 274
  • [46] On the mechanism of grain growth in a YBa2CU3O7-x
    Imaev, MF
    Kazakova, DB
    DOKLADY AKADEMII NAUK, 1999, 368 (04) : 480 - 482
  • [47] NUCLEATION AND GROWTH OF A FLUX INSTABILITY IN SUPERCONDUCTING YBA2CU3O7-X FILMS
    LEIDERER, P
    BONEBERG, J
    BRULL, P
    BUJOK, V
    HERMINGHAUS, S
    PHYSICAL REVIEW LETTERS, 1993, 71 (16) : 2646 - 2649
  • [48] Growth of large area YBa2Cu3O7-x thin film by cylindrical hollow cathode sputtering
    Suh, JD
    Han, SK
    Kang, KY
    Kwak, MH
    IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 2001, 11 (01) : 3844 - 3847
  • [49] PROPERTIES OF YBA2CU3O7-X/YBA2CU2.79CO0.21O7-X/YBA2CU3O7-X EDGE JUNCTIONS
    CHAR, K
    ANTOGNAZZA, L
    GEBALLE, TH
    APPLIED PHYSICS LETTERS, 1994, 65 (07) : 904 - 906
  • [50] GROWTH AND PROPERTIES OF YBA2CU3O7-X SUPERCONDUCTING THIN-FILMS
    SHAH, SI
    FINCHER, CR
    DUCH, MW
    BEAMES, DA
    UNRUH, KM
    SWANN, CP
    THIN SOLID FILMS, 1988, 166 (1-2) : 171 - 179
12345