GROWTH OF LARGE-AREA YBA2CU3O7-X FILMS BY ACTIVATED REACTIVE EVAPORATION

被引：2
|
作者：
PRAKASH, S
CHOU, K
DOERR, HJ
DESHPANDEY, CV
BUNSHAH, RF
机构：
[1] Materials Science and Engineering Department, School of Engineering and Applied Science, University of California at Los Angeles, Los Angeles
来源：
THIN SOLID FILMS | 1993年 / 227卷 / 01期
关键词：
D O I：
10.1016/0040-6090(93)90191-Q
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
High-T(c) superconductor thin films have many important properties for microwave frequency passive device applications. However, for device fabrication it is necessary to deposit uniform defect-free films of YBa2Cu3O7-x (YBCO) over large wafer-size areas. The activated reactive evaporation process has been used successfully to grow YBCO films at relatively low temperatures over large areas. The unique features of the process will be discussed over other popular processes with emphasis on film composition, structure and thickness uniformity,
引用
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页码：95 / 99
页数：5
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