SUB-5 MU-M THIN-FILM CRYSTALLINE SILICON SOLAR-CELL ON ALUMINA CERAMIC SUBSTRATE

Thin film crystalline silicon with the thickness of 3-5 mum was formed on a low-cost alumina ceramic substrate using the laser-beam melt and crystallization (LMC) technique. In the LMC process, buff er layers were introduced between the thin film crystalline silicon and the alumina ceramic substrate to enlarge grain sizes, to reduce stress and to prevent unwanted impurity contamination from the substrate. Thin film crystalline silicon solar cells were experimentally fabricated, and one of them showed a conversion efficiency of 5.9%, short-circuit current of 23.3 mA/cm2 and open-circuit voltage of 0.48 V for the silicon film thickness of 4.2 m.