ELLIPSOMETRIC STUDY OF ETCHING OF GALLIUM-ARSENIDE SURFACE

被引：0
|
作者：
ROGOVSKII, PV
EGOROV, AL
EZHOVSKII, YK
机构：
来源：
JOURNAL OF APPLIED CHEMISTRY OF THE USSR | 1984年 / 57卷 / 09期
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中图分类号：
O69 [应用化学];
学科分类号：
081704 ;
摘要：
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页码：1969 / 1971
页数：3
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