A DESIGN OVERVIEW OF AN ECCENTRIC-MOTION ELECTROSTATIC MICROACTUATOR (THE WOBBLE MOTOR)

被引：43
|
作者：
JACOBSEN, SC
PRICE, RH
WOOD, JE
RYTTING, TH
RAFAELOF, M
机构：
[1] UNIV UTAH,DEPT MECH ENGN,SALT LAKE CITY,UT 84112
[2] UNIV UTAH,DEPT BIOENGN,SALT LAKE CITY,UT 84112
来源：
SENSORS AND ACTUATORS | 1989年 / 20卷 / 1-2期
关键词：
D O I：
10.1016/0250-6874(89)87096-9
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
引用
收藏
页码：1 / 16
页数：16
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