STUDIES OF ENERGY-DISSIPATION IN RESIST FILMS BY A MONTE-CARLO SIMULATION BASED ON THE MOTT CROSS-SECTION

被引：26

作者：

MURATA, K ^{[1
]}

KAWATA, H ^{[1
]}

NAGAMI, K ^{[1
]}

HIRAI, Y ^{[1
]}

MANO, Y ^{[1
]}

机构：

[1] MATSUSHITA ELECT IND CO LTD,SEMICOND RES CTR,MORIGUCHI,OSAKA 570,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 01期

关键词：

D O I：

10.1116/1.583845

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：124 / 128

页数：5

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