THE ROLE OF HYDROGEN IN SILICON-NITRIDE AND SILICON OXYNITRIDE FILMS

被引：33
|
作者：
SCHALCH, D
SCHARMANN, A
WOLFRAT, R
机构：
来源：
THIN SOLID FILMS | 1985年 / 124卷 / 3-4期
关键词：
D O I：
10.1016/0040-6090(85)90280-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：301 / 308
页数：8
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