ANODE AND THERMAL FILMS OF YTTRIUM-STABILIZED ZIRCONIUM DIOXIDE FOR BUFFER LAYERS ON SILICON

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作者：
LYNKOV, LM
KARELIN, YK
TSEIGER, EN
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PISMA V ZHURNAL TEKHNICHESKOI FIZIKI | 1993年 / 19卷 / 10期
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O59 [应用物理学];
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页码：44 / 47
页数：4
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