APPARATUS FOR REACTIVE ION ETCHING IN MAGNETRON DISCHARGE

被引：0
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作者：
KIZIITOV, KM
KORZH, IA
VOLYNKIN, AA
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INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 1988年 / 31卷 / 02期
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T [工业技术];
学科分类号：
08 ;
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页码：507 / 509
页数：3
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