NUMERICAL-CALCULATIONS OF EFFECTIVE BARRIER HEIGHTS OF METAL/GE CONTACTS FORMED BY ION-IMPLANTATION

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作者：
MARSHALL, ED
RANDOLPH, MW
WU, CS
LAU, SS
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来源：
PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS | 1985年 / 530卷
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中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
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页码：122 / 126
页数：5
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