OPTICAL WAVE-GUIDES IN SIMOX STRUCTURES

被引：44
|
作者：
WEISS, BL
REED, GT
TOH, SK
SOREF, RA
NAMAVAR, F
机构：
[1] USAF,ROME AIR DEV CTR,SOLID STATE SCI DIRECTORATE,BEDFORD,MA 01731
[2] SPIRE CORP,BEDFORD,MA 01730
来源：
IEEE PHOTONICS TECHNOLOGY LETTERS | 1991年 / 3卷 / 01期
关键词：
D O I：
10.1109/68.68035
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Planar optical waveguides have been formed in SIMOX structures and their propagation characteristics have been determined. All the samples were found to support both TE and TM modes at both 1.15-mu-m and 1.523-mu-m with a lowest propagation loss of 8 dB/cm. This loss was measured at a wavelength of 1.15-mu-m for the TE0 mode of a planar waveguide with a 2.0-mu-m-thick Si guiding layer.
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页码：19 / 21
页数：3
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