STUDY OF THIN-FILMS PREPARED IN GLOW-DISCHARGE FROM HYDROCARBONS

被引:0
|
作者
FILIP, J
HRACH, R
HRACHOVA, V
机构
关键词
D O I
暂无
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:377 / 379
页数:3
相关论文
共 50 条
  • [31] ELEMENTAL COMPOSITION PROFILING IN THIN-FILMS BY GLOW-DISCHARGE MASS-SPECTROMETRY - DEPTH RESOLUTION
    COBURN, JW
    ECKSTEIN, EW
    KAY, E
    JOURNAL OF APPLIED PHYSICS, 1975, 46 (07) : 2828 - 2830
  • [32] EFFECTS OF DEPOSITION TEMPERATURE ON PROPERTIES OF RF GLOW-DISCHARGE AMORPHOUS-SILICON THIN-FILMS
    BERTRAN, E
    ANDUJAR, JL
    CANILLAS, A
    ROCH, C
    SERRA, J
    SARDIN, G
    THIN SOLID FILMS, 1991, 205 (02) : 140 - 145
  • [33] PREPARATION OF POLYCRYSTALLINE SILICON THIN-FILMS BY CATHODE-TYPE RF GLOW-DISCHARGE METHOD
    JAYATISSA, AH
    NAKANISHI, Y
    HATANAKA, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (9A): : 3729 - 3733
  • [34] ELLIPSOMETRIC STUDY OF A-SI-H THIN-FILMS DEPOSITED BY SQUARE-WAVE MODULATED RF GLOW-DISCHARGE
    LLORET, A
    BERTRAN, E
    ANDUJAR, JL
    CANILLAS, A
    MORENZA, JL
    JOURNAL OF APPLIED PHYSICS, 1991, 69 (02) : 632 - 638
  • [35] THIN POLYMER-FILMS BY GLOW-DISCHARGE INDIRECT METHOD
    MORITA, S
    SAWA, G
    IEDA, M
    JOURNAL OF MACROMOLECULAR SCIENCE-CHEMISTRY, 1976, A 10 (03): : 501 - 517
  • [36] FORMATION OF CARBON THIN-FILMS USING DC, AC SINE, AND AC RECTANGULAR WAVE GLOW-DISCHARGE
    TAKAHASHI, K
    KURODA, A
    KANZAWA, A
    HONDA, T
    KAGAKU KOGAKU RONBUNSHU, 1990, 16 (03) : 469 - 474
  • [37] THE EFFECTS OF THE GLASS SUBSTRATE ON THE PROPERTIES OF RF GLOW-DISCHARGE AMORPHOUS SI-H THIN-FILMS
    KOO, YC
    PERRIN, R
    AUST, KT
    ZUKOTYNSKI, S
    KRUZELECKY, RV
    JOURNAL OF APPLIED PHYSICS, 1988, 63 (07) : 2443 - 2445
  • [38] CHARACTERIZATION OF A-SIGE-H FILMS PREPARED BY RF GLOW-DISCHARGE
    DAS, D
    DE, SC
    RAY, S
    BARUA, AK
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1991, 128 (02) : 172 - 182
  • [39] DEPOSITION OF THIN-FILMS BY DECOMPOSITION OF TETRA-ETHOXY SILANE IN A RADIO-FREQUENCY GLOW-DISCHARGE
    MUKHERJEE, SP
    EVANS, PE
    THIN SOLID FILMS, 1972, 14 (01) : 105 - 118
  • [40] THERMOEFFUSION OF HYDROGEN IN A-C-H FILMS PREPARED BY GLOW-DISCHARGE
    KOSAREV, AI
    ABDULVAGABOV, MS
    BAIKOV, JM
    ZHDANOVICH, NS
    CVETKOV, VF
    SURFACE & COATINGS TECHNOLOGY, 1992, 50 (03): : 209 - 212