OXIDATION THROUGH THE ZIRCONIA SUBSTRATES OF HETEROEPITAXIAL SILICON FILMS GROWN ON YTTRIA-STABILIZED CUBIC ZIRCONIA

被引：2
|
作者：
GOLECKI, I
MADDOX, RL
GLASS, HL
LIN, AL
RAAB, TJ
MANASEVIT, HM
机构：
来源：
JOURNAL OF ELECTRONIC MATERIALS | 1985年 / 14卷 / 05期
关键词：
D O I：
10.1007/BF02654023
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：531 / 550
页数：20
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