PROPERTIES OF METAL-DIELECTRIC CODEPOSITED FILMS

被引：6
|
作者：
TAYLOR, G [1 ]
LALEVIC, B [1 ]
SLUSARK, W [1 ]
机构：
[1] RUTGERS STATE UNIV,COLL ENGN,DEPT ELECT ENGN,NEW BRUNSWICK,NJ 08903
来源：
THIN SOLID FILMS | 1976年 / 39卷 / DEC期
关键词：
D O I：
10.1016/0040-6090(76)90634-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：165 / 174
页数：10
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