ANNEALING BEHAVIOR OF VAPOUR-DEPOSITED AL-RH THIN-FILMS

被引：7
|
作者：
CHAUDHURY, ZA
SURYANARAYANA, C
机构：
来源：
THIN SOLID FILMS | 1982年 / 98卷 / 03期
关键词：
D O I：
10.1016/0040-6090(82)90406-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：233 / 239
页数：7
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