REMOVAL OF NON-DIAMOND CARBON FROM THE SURFACE OF CVD DIAMOND FILMS

被引:6
|
作者
ENGEL, W [1 ]
INGRAM, DC [1 ]
KEAY, JC [1 ]
KORDESCH, ME [1 ]
机构
[1] MAX PLANCK GESELL,FRITZ HABER INST,D-14195 BERLIN,GERMANY
关键词
D O I
10.1016/0925-9635(94)90125-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A thin (10 nm) carbon contaminant film is found to adhere to chemically vapor-deposited diamond films. This layer may be removed with a simple wash in isopropanol.
引用
收藏
页码:1227 / 1229
页数:3
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