Effects of reductive annealing on insulating polycrystalline thin films of Nb-doped anatase TiO2: recovery of high conductivity

被引：5
|
作者：
Nakao, Shoichiro [1 ,2 ]
Hirose, Yasushi [1 ,2 ,3 ]
Hasegawa, Tetsuya [1 ,2 ,3 ]
机构：
[1] Kanagawa Acad Sci & Technol, Kawasaki, Kanagawa 2130012, Japan
[2] Japan Sci & Technol Agcy, CREST, Bunkyo Ku, Tokyo 1130033, Japan
[3] Univ Tokyo, Dept Chem, Bunkyo Ku, Tokyo 1130033, Japan
来源：
JOURNAL OF SEMICONDUCTORS | 2016年 / 37卷 / 02期
关键词：
transparent conductive oxide; Nb-doped TiO2; pulsed laser deposition;
D O I：
10.1088/1674-4926/37/2/022001
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
We studied the effects of reductive annealing on insulating polycrystalline thin films of anatase Nb-doped TiO2 (TNO). The insulating TNO films were intentionally fabricated by annealing conductive TNO films in oxygen ambient at 400 degrees C. Reduced free carrier absorption in the insulating TNO films indicated carrier compensation due to excess oxygen. With H-2-annealing, both carrier density and Hall mobility recovered to the level of conducting TNO, demonstrating that the excess oxygen can be efficiently removed by the annealing process without introducing additional scattering centers.
引用
收藏
页数：4
相关论文
共 50 条
  • [31] Transparent conductivity of fluorine-doped anatase TiO2 epitaxial thin films
    Mohri, Satoru
    Hirose, Yasushi
    Nakao, Shoichiro
    Yamada, Naoomi
    Shimada, Toshihiro
    Hasegawa, Tetsuya
    JOURNAL OF APPLIED PHYSICS, 2012, 111 (09)
  • [32] MBE growth and characterization of epitaxial TiO2 and Nb-doped TiO2 films
    Gao, Y
    Chambers, SA
    MATERIALS LETTERS, 1996, 26 (4-5) : 217 - 221
  • [33] Influence of Oxygen Vacancies on Atomic Chemistry and Transparent Conductivity of Nb-Doped TiO2 Films
    Angang Song
    Guoqin Cao
    Di Zhu
    Baofeng Zhao
    Zhenya Fu
    Shuaiqi Cao
    Qingjie Wang
    Junhua Hu
    Journal of Electronic Materials, 2022, 51 : 6885 - 6893
  • [34] Influence of Oxygen Vacancies on Atomic Chemistry and Transparent Conductivity of Nb-Doped TiO2 Films
    Song, Angang
    Cao, Guoqin
    Zhu, Di
    Zhao, Baofeng
    Fu, Zhenya
    Cao, Shuaiqi
    Wang, Qingjie
    Hu, Junhua
    JOURNAL OF ELECTRONIC MATERIALS, 2022, 51 (12) : 6885 - 6893
  • [35] ELECTRICAL-PROPERTIES OF CR-DOPED AND NB-DOPED TIO2 THIN-FILMS
    BERNASIK, A
    RADECKA, M
    REKAS, M
    SLOMA, M
    APPLIED SURFACE SCIENCE, 1993, 65-6 : 240 - 245
  • [36] Photoinduced amphiphilic surface on polycrystalline anatase TiO2 thin films
    Nakajima, A
    Koizumi, S
    Watanabe, T
    Hashimoto, K
    LANGMUIR, 2000, 16 (17) : 7048 - 7050
  • [37] Conductive Nb-doped TiO2 thin films with whole visible absorption to degrade pollutants
    Yang, Xiaoyang
    Min, Yuxin
    Li, Sibai
    Wang, Dawei
    Mei, Zongwei
    Liang, Jun
    Pan, Feng
    CATALYSIS SCIENCE & TECHNOLOGY, 2018, 8 (05) : 1357 - 1365
  • [38] Investigation of effect of doping concentration in Nb-doped TiO2 thin films for TCO applications
    Satyavir Singh
    Vikas Sharma
    Kanupriya Sachdev
    Journal of Materials Science, 2017, 52 : 11580 - 11591
  • [39] Effect of micromorphology on transport properties of Nb-doped anatase TiO2 films: A transmission electron microscopy study
    Ogawa, Daisuke
    Nakao, Shoichiro
    Morikawa, Kazuo
    Ebisawa, Mizue
    Hirose, Yasushi
    Hasegawa, Tetsuya
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2017, 214 (03):
  • [40] Investigation of effect of doping concentration in Nb-doped TiO2 thin films for TCO applications
    Singh, Satyavir
    Sharma, Vikas
    Sachdev, Kanupriya
    JOURNAL OF MATERIALS SCIENCE, 2017, 52 (19) : 11580 - 11591
12345