CHARGE STORAGE PROPERTIES OF PLASMA-DEPOSITED SILICON-NITRIDE FILMS AND THE EFFECT OF INTERFACE STATES

被引：0

作者：

HEZEL, R ^{[1
]}

BAUCH, W ^{[1
]}

机构：

[1] UNIV ERLANGEN NURNBERG,INST WERKSTOFFWISSENSCH 6,D-8520 ERLANGEN,FED REP GER

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1985年 / 132卷 / 08期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C350 / C350

页数：1

共 50 条

[31] LOW RESISTANCE PROGRAMMABLE CONNECTIONS THROUGH PLASMA-DEPOSITED SILICON-NITRIDE
BURNS, JA
CHAPMAN, GH
EMERSON, BL
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (08) : C313 - C313
[32] PHYSICAL AND ELECTRICAL-PROPERTIES OF PLASMA DEPOSITED SILICON-NITRIDE FILMS
FUNG, CD
NAGY, TE
KO, WH
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (03) : C78 - C78
[33] Effect of hydrogen dilution on the properties and bonding in plasma-deposited silicon nitride
1600, (72):
[34] PROPERTIES OF PLASMA-DEPOSITED SILICON OXYNITRIDE FILMS
TAKASAKI, K
KOYAMA, K
TAKAGI, M
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (08) : C372 - C372
[35] THE EFFECT OF AR+ SPUTTERING ON THE X-RAY PHOTOELECTRON-SPECTRA OF PLASMA-DEPOSITED SILICON-NITRIDE FILMS
CHIANG, JN
HESS, DW
JOURNAL OF APPLIED PHYSICS, 1989, 65 (09) : 3430 - 3434
[36] PROPERTIES OF VERY LOW-TEMPERATURE PLASMA DEPOSITED SILICON-NITRIDE FILMS
JUANG, C
CHANG, JH
HWANG, RY
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (03): : 1221 - 1223
[37] DENSIFICATION OF PLASMA DEPOSITED SILICON-NITRIDE FILMS BY HYDROGEN DILUTION
ROCHELEAU, RE
ZHANG, Z
THIN SOLID FILMS, 1992, 220 (1-2) : 73 - 79
[38] PLASMA DEPOSITED SILICON-NITRIDE FILMS FOR GAAS ANNEALING ENCAPSULATION
CHEN, DM
SWANSON, AW
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (03) : C88 - C88
[39] POTENTIOSTATIC TESTING OF PLASMA-DEPOSITED SILICON-NITRIDE THIN PROTECTIVE FILMS FOR BONDS, BONDWIRES AND BONDPADS IN MICROELECTRONIC ASSEMBLIES
ULRICH, RK
YI, DY
BROWN, WD
ANG, SS
CORROSION SCIENCE, 1992, 33 (03) : 403 - 412
[40] ADHESION, FRICTION, AND WEAR OF PLASMA-DEPOSITED THIN SILICON-NITRIDE FILMS AT TEMPERATURES TO 700-DEGREES-C
MIYOSHI, K
POUCH, JJ
ALTEROVITZ, SA
PANTIC, DM
JOHNSON, GA
WEAR, 1989, 133 (01) : 107 - 123

← 1 2 3 4 5 →