COMPARISON OF OPTICAL WAVE-GUIDE LOSSES IN SILICON-ON-INSULATOR

被引：21
|
作者：
ZINKE, T
FISCHER, U
SPLETT, A
SCHUPPERT, B
PETERMANN, K
机构：
[1] Technische Universität, Berlin Institut für Hochfrequenztechnik, D-10587 Berlin
来源：
ELECTRONICS LETTERS | 1993年 / 29卷 / 23期
关键词：
OPTICAL WAVE-GUIDES; INTEGRATED OPTICS; SILICON-ON-INSULATOR;
D O I：
10.1049/el:19931356
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Waveguide losses in SOI (silicon-on-insulator) material fabricated by different techniques are compared thus enabling us to confirm the theoretical dependence of losses on layer thickness. Single-mode waveguide losses in BE-SOI (bond and etchback-SOI) below 0.5dB/cm are reported for waveguides with cross-sections of several square micrometres.
引用
收藏
页码：2031 / 2033
页数：3
相关论文
共 50 条
  • [21] Nonlinearities in silicon-on-insulator optical waveguides
    Tsang, HK
    PASSIVE COMPONENTS AND FIBER-BASED DEVICES II, PT 1 AND 2, 2005, 6019 : U433 - U441
  • [22] Modeling and measurement of losses in silicon-on-insulator resonators and bends
    Xiao, Shijun
    Khan, Maroof H.
    Shen, Hao
    Qi, Minghao
    OPTICS EXPRESS, 2007, 15 (17): : 10553 - 10561
  • [23] OPTICAL WAVE-GUIDE MICROSCOPY
    HICKEL, W
    KNOLL, W
    APPLIED PHYSICS LETTERS, 1990, 57 (13) : 1286 - 1288
  • [24] OPTICAL WAVE-GUIDE PROCESSORS
    SEMENOV, AS
    SMIRNOV, VL
    SHMALKO, AV
    KVANTOVAYA ELEKTRONIKA, 1987, 14 (07): : 1319 - 1360
  • [25] OPTICAL WAVE-GUIDE MODELING
    PASK, C
    OPTICAL AND QUANTUM ELECTRONICS, 1994, 26 (03) : R5 - R5
  • [26] WAVE-GUIDE OPTICAL POLARIZATOR
    ADAMSON, PV
    OPTIKA I SPEKTROSKOPIYA, 1988, 65 (06): : 1335 - 1337
  • [27] OPTICAL WAVE-GUIDE SENSORS
    FLUITMAN, J
    POPMA, T
    SENSORS AND ACTUATORS, 1986, 10 (1-2): : 25 - 46
  • [28] REDUCTION OF CROSSTALK AND LOSSES OF INTERSECTING WAVE-GUIDE
    ARETZ, K
    BULOW, H
    ELECTRONICS LETTERS, 1989, 25 (11) : 730 - 731
  • [29] TRANSMISSION AND COUPLING LOSSES IN A FOLDED WAVE-GUIDE
    BANERJI, J
    DAVIES, AR
    JACKSON, PE
    JENKINS, RM
    APPLIED OPTICS, 1989, 28 (21): : 4637 - 4643
  • [30] ESTIMATION OF RIB WAVE-GUIDE RADIATION LOSSES
    STERN, MS
    KENDALL, PC
    ROBSON, PN
    ELECTRONICS LETTERS, 1988, 24 (01) : 17 - 19
12345