PREPARATION OF PBTIO3 THIN-FILMS BY AN EXCIMER LASER ABLATION TECHNIQUE WITH 2ND LASER IRRADIATION

Ferroelectric PbTiO3 thin films have been formed on based electrodes of Pt or oxide superconductor ((La, Sr)2CuO4) by an ArF excimer laser ablation technique. A second laser irradiation at the substrate surface is quite effective in the crystallization of the films at low substrate temperature below 400-degrees-C. The suitable energy density of the irradiation laser is in the range of 30-100 mJ/cm2. X-ray diffraction patterns of PbTiO3 thin films show c-axis orientation, with FWHM (full width at half maximum) of rocking curve of 0.5-degrees-1.0-degrees. These films exhibit a ferroelectric hysteresis loop. The dielectric constant and remanent polarization of the PbTiO3 films are in the range of 120-150 and 20-25 muC/cm2, respectively.