FRICTION AND WEAR PROPERTIES OF THIN-FILMS OF CARBON WITH DIAMOND STRUCTURE PREPARED BY IONIZED DEPOSITION

被引：21

作者：

OKADA, K ^{[1
]}

NAMBA, Y ^{[1
]}

机构：

[1] TOKYO NOKO UNIV,FAC TECHNOL,DEPT ELECT ENGN,TOKYO 184,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 02期

关键词：

D O I：

10.1116/1.575741

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：132 / 135

页数：4

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