DEFECT GENERATION IN SILICON DIOXIDE FROM SOFT-X-RAY SYNCHROTRON RADIATION

被引：33
|
作者：
WILLIAMS, CK
REISMAN, A
BHATTACHARYA, P
NG, W
机构：
[1] SUNY STONY BROOK,STONY BROOK,NY 11792
[2] N CAROLINA STATE UNIV,DEPT ELECT & COMP ENGN,RALEIGH,NC 27695
[3] BHABHA ATOM RES CTR,BOMBAY 400085,INDIA
来源：
JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 03期
关键词：
D O I：
10.1063/1.341876
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1145 / 1151
页数：7
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