MODELING OF THE SILICON INTEGRATED-CIRCUIT DESIGN AND MANUFACTURING PROCESS

被引：14

|

作者：

DUTTON, RW

机构：

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1983年 / 30卷 / 09期

关键词：

D O I：

10.1109/T-ED.1983.21250

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：968 / 986

页数：19

相关论文

共 50 条

[1] MODELING OF THE SILICON INTEGRATED-CIRCUIT DESIGN AND MANUFACTURING PROCESS
DUTTON, RW
SIAM JOURNAL ON SCIENTIFIC AND STATISTICAL COMPUTING, 1983, 4 (03): : 357 - 390
[2] INTEGRATED-CIRCUIT PROCESS MODELING
HILL, C
BUTLER, AL
INSTITUTE OF PHYSICS CONFERENCE SERIES, 1984, (69): : 161 - 180
[3] INTEGRATED-CIRCUIT DESIGN FOR MANUFACTURING THROUGH STATISTICAL SIMULATION OF PROCESS STEPS
SANDERS, TJ
REKAB, K
ROTELLA, FM
MEANS, DP
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 1992, 5 (04) : 368 - 372
[4] HMIC - A SILICON MICROWAVE INTEGRATED-CIRCUIT PROCESS
不详
MICROWAVE JOURNAL, 1994, 37 (01) : 136 - &
[5] SILICON-WAFERS FOR INTEGRATED-CIRCUIT PROCESS
LEROY, B
REVUE DE PHYSIQUE APPLIQUEE, 1986, 21 (08): : 467 - 488
[6] PROCESS MODELING OF INTEGRATED-CIRCUIT DEVICE TECHNOLOGY
DUTTON, RW
HANSEN, SE
PROCEEDINGS OF THE IEEE, 1981, 69 (10) : 1305 - 1320
[7] THE MODELING OF PHYSICAL PROCESSES IN SILICON INTEGRATED-CIRCUIT FABRICATION
GODFREY, DJ
GEC JOURNAL OF RESEARCH, 1987, 5 (03): : 156 - 160
[8] METALLIZATION FOR INTEGRATED-CIRCUIT MANUFACTURING
JOSHI, RV
BLEWER, RS
MURARKA, S
MRS BULLETIN, 1995, 20 (11) : 33 - 37
[9] MODELING PHYSICAL PROCESSES IN SILICON INTEGRATED-CIRCUIT FABRICATION
GODFREY, DJ
PHYSICS IN TECHNOLOGY, 1986, 17 (06): : 260 - &
[10] Limits of integrated-circuit manufacturing
Doering, R
Nishi, Y
PROCEEDINGS OF THE IEEE, 2001, 89 (03) : 375 - 393

← 1 2 3 4 5 →