CORRELATION OF THERMAL-WAVE IMAGING TO OTHER ANALYSIS-METHODS

被引：18

作者：

MAREK, J

STRAUSSER, YE

机构：

[1] MAX PLANCK INST FESTKORPERFORSCH,D-7000 STUTTGART 80,FED REP GER

[2] THERMA WAVE INC,FREMONT,CA 94539

来源：

关键词：

D O I：

10.1063/1.94674

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1152 / 1154

页数：3

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