MOLECULAR-DYNAMICS SIMULATION METHODS APPLIED TO ION-BEAM MIXING

被引:3
|
作者
MAZZONE, AM
机构
[1] CNR, Istituto LAMEL, 40126 Bologna
关键词
D O I
10.1016/0040-6090(92)90885-F
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Results of molecular dynamics simulations of the thermal phase of the intermixing of a metallic bilayer are presented in this work. This study is illustrative of the possibility of applying a molecular dynamics simulation method to the characterization of thin film processing.
引用
收藏
页码:145 / 148
页数:4
相关论文
共 50 条
  • [21] ION-BEAM MIXING IN SILICON SYSTEMS
    PAINE, BM
    PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1985, 530 : 114 - 121
  • [22] ION-BEAM MIXING FOR SILICIDE FORMATION
    AGAMY, SA
    KHALIL, MY
    BADAWI, AA
    ISOTOPENPRAXIS, 1990, 26 (06): : 265 - 268
  • [23] ION-BEAM MIXING OF AG ON GLASS
    WANG, KM
    BURMAN, C
    LANFORD, WA
    GROLEAU, R
    RADIATION EFFECTS LETTERS, 1985, 85 (04): : 177 - 183
  • [24] ION-BEAM MIXING OF TE/AU
    JABR, IJ
    MEYER, JD
    ALSALEH, KA
    SALEH, NS
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1988, 105 (01): : 177 - 181
  • [25] ION-BEAM MIXING OF AL WITH GAAS
    FASTOW, R
    EIZENBERG, M
    KALISH, R
    RICHTER, V
    BRENER, R
    PEISACH, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (05): : 2842 - 2844
  • [26] ADVANTAGES OF DYNAMIC ION-BEAM MIXING
    KIUCHI, M
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 : 1343 - 1348
  • [27] ION-BEAM MIXING OF ALUMINUM AND TITANIUM
    BORGESEN, P
    LILIENFIELD, DA
    JOHNSON, HH
    JOURNAL OF APPLIED PHYSICS, 1989, 66 (02) : 513 - 519
  • [28] THE CHARACTERISTIC TEMPERATURE OF ION-BEAM MIXING
    RAUSCHENBACH, B
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1987, 102 (02): : 645 - 651
  • [29] ION-BEAM MIXING - BASIC EXPERIMENTS
    PAINE, BM
    AVERBACK, RS
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR): : 666 - 675
  • [30] MOLECULAR-DYNAMICS SIMULATION OF CLUSTER-ION FRAGMENTATION
    WEINSTEIN, JD
    FISHER, RT
    VASANAWALA, S
    SHAPIRO, MH
    TOMBRELLO, TA
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 88 (1-2): : 74 - 80