2ND-ORDER OPTICAL NONLINEARITIES OF RADIO-FREQUENCY SPUTTER-DEPOSITED AIN THIN-FILMS

被引:32
|
作者
LIN, WP [1 ]
LUNDQUIST, PM [1 ]
WONG, GK [1 ]
RIPPERT, ED [1 ]
KETTERSON, JB [1 ]
机构
[1] NORTHWESTERN UNIV,MAT RES CTR,EVANSTON,IL 60208
关键词
D O I
10.1063/1.110311
中图分类号
O59 [应用物理学];
学科分类号
摘要
Polarized second harmonic generation measurements were performed on AlN films deposited on (100) sapphire substrates by the reactive rf sputtering technique. The bulk effective second order nonlinearity observed in these films is typically about 6 x 10(-9) esu at 1.06 mum, several times larger than that of quartz or KTP. The tensorial properties of the nonlinearity are consistent with the crystal symmetry of AlN and the microcrystallinity of these films.
引用
收藏
页码:2875 / 2877
页数:3
相关论文
共 50 条
  • [21] Composition control of radio-frequency magnetron sputter-deposited La0.5Sr0.5CoO3−∂ thin films
    D. O. Klenov
    W. Donner
    L. Chen
    A. J. Jacobson
    S. Stemmer
    Journal of Materials Research, 2003, 18 : 188 - 194
  • [22] STRUCTURE AND STABILITY OF SPUTTER-DEPOSITED BETA-TUNGSTEN THIN-FILMS
    WEERASEKERA, IA
    SHAH, SI
    BAXTER, DV
    UNRUH, KM
    APPLIED PHYSICS LETTERS, 1994, 64 (24) : 3231 - 3233
  • [23] RADIO-FREQUENCY SPUTTER DEPOSITED BORON-NITRIDE FILMS
    WIGGINS, MD
    AITA, CR
    HICKERNELL, FS
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02): : 322 - 325
  • [24] THE EFFECTS OF COLLIMATION ON INTRINSIC STRESS IN SPUTTER-DEPOSITED METALLIC THIN-FILMS
    JANACEK, T
    LIU, D
    DEW, SK
    BRETT, MJ
    SMY, TJ
    THIN SOLID FILMS, 1994, 253 (1-2) : 372 - 376
  • [25] Lithium diffusion in sputter-deposited lithium iron phosphate thin-films
    Koehler, Mathias
    Berkemeier, Frank
    Gallasch, Tobias
    Schmitz, Guido
    JOURNAL OF POWER SOURCES, 2013, 236 : 61 - 67
  • [26] CORROSION MECHANISM OF SPUTTER-DEPOSITED TBFE THIN-FILMS IN AQUEOUS ENVIRONMENT
    AKAO, N
    SUGIMOTO, K
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1992, 139 (06) : 1560 - 1565
  • [27] INSITU INVESTIGATION OF SPUTTER-DEPOSITED THIN-FILMS BY ION SPUTTERING SPECTROMETRY
    KU, YS
    SU, CS
    SURFACE & COATINGS TECHNOLOGY, 1992, 51 (1-3): : 405 - 409
  • [28] STRESSES IN SPUTTER-DEPOSITED NICKEL AND COPPER-OXIDE THIN-FILMS
    PLUNKETT, PV
    JOHNSON, RM
    WISEMAN, CD
    THIN SOLID FILMS, 1979, 64 (01) : 121 - 128
  • [29] RADIO-FREQUENCY SPUTTER-DEPOSITION AND PROPERTIES OF CALCIUM-FLUORIDE THIN-FILMS
    MARECHAL, N
    QUESNEL, E
    JULIET, P
    PAULEAU, Y
    JOURNAL OF APPLIED PHYSICS, 1993, 74 (08) : 5203 - 5211
  • [30] PROPERTIES OF REACTIVELY SPUTTER-DEPOSITED TA-N THIN-FILMS
    SUN, X
    KOLAWA, E
    CHEN, JS
    REID, JS
    NICOLET, MA
    THIN SOLID FILMS, 1993, 236 (1-2) : 347 - 351