2ND-ORDER OPTICAL NONLINEARITIES OF RADIO-FREQUENCY SPUTTER-DEPOSITED AIN THIN-FILMS

被引:32
|
作者
LIN, WP [1 ]
LUNDQUIST, PM [1 ]
WONG, GK [1 ]
RIPPERT, ED [1 ]
KETTERSON, JB [1 ]
机构
[1] NORTHWESTERN UNIV,MAT RES CTR,EVANSTON,IL 60208
关键词
D O I
10.1063/1.110311
中图分类号
O59 [应用物理学];
学科分类号
摘要
Polarized second harmonic generation measurements were performed on AlN films deposited on (100) sapphire substrates by the reactive rf sputtering technique. The bulk effective second order nonlinearity observed in these films is typically about 6 x 10(-9) esu at 1.06 mum, several times larger than that of quartz or KTP. The tensorial properties of the nonlinearity are consistent with the crystal symmetry of AlN and the microcrystallinity of these films.
引用
收藏
页码:2875 / 2877
页数:3
相关论文
共 50 条
  • [1] INTRINSIC STRESS IN SPUTTER-DEPOSITED THIN-FILMS
    WINDISCHMANN, H
    CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, 1992, 17 (06) : 547 - 596
  • [2] OPTICAL-PROPERTIES OF SPUTTER-DEPOSITED CERIUM OXYFLUORIDE THIN-FILMS
    ZHENG, SY
    ANDERSSONFALDT, AM
    STJERNA, B
    GRANQVIST, CG
    APPLIED OPTICS, 1993, 32 (31): : 6303 - 6309
  • [3] ISLAND STRUCTURE OF SPUTTER-DEPOSITED AG THIN-FILMS
    BABA, S
    KINBARA, A
    ADACHI, M
    VACUUM, 1991, 42 (04) : 279 - 282
  • [4] LASER ENHANCED ADHESION OF SPUTTER-DEPOSITED THIN-FILMS
    PEDRAZA, AJ
    JOURNAL OF METALS, 1988, 40 (07): : A79 - A79
  • [5] MICROSTRUCTURAL STUDY OF SPUTTER-DEPOSITED CDTE THIN-FILMS
    LI, X
    GESSERT, TA
    MATSON, RJ
    HALL, JF
    COUTTS, TJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1994, 12 (04): : 1608 - 1613
  • [6] Evaluation of radio-frequency sputter-deposited textured TiN thin films as diffusion barriers between copper and silicon
    Chen, GS
    Guo, JJ
    Lin, CK
    Hsu, CS
    Yang, LC
    Fang, JS
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2002, 20 (02): : 479 - 485
  • [7] GROWTH AND PROPERTIES OF SPUTTER-DEPOSITED CUINS2 THIN-FILMS
    HWANG, HL
    CHENG, CL
    LIU, LM
    LIU, YC
    SUN, CY
    THIN SOLID FILMS, 1980, 67 (01) : 83 - 93
  • [8] ELECTRICAL-CONDUCTIVITY AND OPTICAL TRANSMITTANCE OF SPUTTER-DEPOSITED SNOX THIN-FILMS
    STJERNA, B
    GRANQVIST, CG
    SOLAR ENERGY MATERIALS, 1990, 20 (03): : 225 - 233
  • [9] OPTICAL-PROPERTIES OF SPUTTER-DEPOSITED ZNO-AL THIN-FILMS
    JIN, ZC
    HAMBERG, I
    GRANQVIST, CG
    JOURNAL OF APPLIED PHYSICS, 1988, 64 (10) : 5117 - 5131
  • [10] REACTIVELY SPUTTER-DEPOSITED AND COEVAPORATED TEOX THIN-FILMS FOR OPTICAL-RECORDING
    LEE, WY
    SEQUEDA, F
    SALEM, J
    LIM, G
    DAVIS, CR
    COUFAL, H
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03): : 553 - 557