INFLUENCE OF IMPURITY GASES ON PROPERTIES OF CO-CR SPUTTERED FILMS

被引：1
|
作者：
SAGOI, M
NISHIKAWA, R
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 02期
关键词：
D O I：
10.1116/1.575747
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：166 / 169
页数：4
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