FLUIDIC SELF-ASSEMBLY OF INGAAS VERTICAL-CAVITY SURFACE-EMITTING LASERS ONTO SILICON

被引：40
|
作者：
TU, JK [1 ]
TALGHADER, JJ [1 ]
HADLEY, MA [1 ]
SMITH, JS [1 ]
机构：
[1] UNIV CALIF BERKELEY, ELECTR RES LAB, BERKELEY, CA 94720 USA
来源：
ELECTRONICS LETTERS | 1995年 / 31卷 / 17期
关键词：
VERTICAL CAVITY SURFACE EMITTING LASERS; PACKAGING;
D O I：
10.1049/el:19950989
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Vertical cavity surface emitting lasers (VCSELs) have been successfully integrated by fluidic self-assembly (FSA) into 10 mu m deep holes etched into an Si substrate. These 40 x 40 x 10 mu m(3) devices were fully planarised and metallised after integration. The VCSELs operated pulsed at 0.98 mu m with a threshold current as low as 75mA and a turn-on voltage of 2.9V.
引用
收藏
页码：1448 / 1449
页数：2
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