MULTIVARIATE-ANALYSIS OF PECVD DATA

被引：1

作者：

DOSE, V

机构：

[1] Max-Planck-Institut für Plasmaphysik, EURATOM-Association, Garching/München, W-8046

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1993年 / 56卷 / 06期

关键词：

D O I：

10.1007/BF00331398

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Basic research in PECVD aims at disclosing relations between quantities determining the plasma performance and solid-state properties of deposited thin films. Linear concepts of multivariate analysis provide a simple and very useful first approach to this goal. In this paper we apply the techniques of principal component analysis, canonical correlation and group analysis to recently published PECVD data. We also touch upon experimental strategy.

引用

页码：471 / 477

页数：7

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