ELECTRON-ENERGY DISTRIBUTION-FUNCTIONS IN WEAKLY IONIZED ARGON

被引:16
|
作者
VRHOVAC, SB
RADOVANOV, SB
PETROVIC, ZL
JELENKOVIC, BM
机构
[1] Institute of Physics, Zemun, Beograd, 11080
关键词
D O I
10.1088/0022-3727/25/2/014
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this paper we present measurements of the electron energy distribution functions (EEDF) for electrons in argon discharges at moderate and high E/N values (E being the electric field and N the gas density), for homogeneous electric fields and a low-current diffuse glow regime. Results were obtained for electric field to gas density ratios (E/N from 500 Td to 50 kTd (1 Td = 10(-21) V m2). A multigridded energy analyser with a retarding grid potential was used to measure distribution functions of electrons sampled through an aperture in the anode. Experimental data are used to make a comparison with the two-term Boltzmann calculations for E/N < 1 kTd, and the single-beam model predictions, normally used to model electron kinetics at high values of E/N.
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页码:217 / 225
页数:9
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