HYDROGEN IN SI - DIFFUSION AND SHALLOW IMPURITY DEACTIVATION

被引:28
作者
CAPIZZI, M
MITTIGA, A
机构
来源
PHYSICA B & C | 1987年 / 146卷 / 1-2期
关键词
D O I
10.1016/0378-4363(87)90048-9
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:19 / 29
页数:11
相关论文
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