DEPTH PROFILE DETERMINATION BY ION-INDUCED X-RAY SPECTROSCOPY

被引:33
|
作者
PABST, W [1 ]
机构
[1] TECH UNIV MUNICH,LEHRSTUHL INTEGRIERTE SCHALTUNGEN,MUNICH,WEST GERMANY
来源
NUCLEAR INSTRUMENTS & METHODS | 1974年 / 120卷 / 03期
关键词
D O I
10.1016/0029-554X(74)90028-7
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:543 / 545
页数:3
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