ETCHING OF ALUMINUM IN A LOW-PRESSURE GAS-DISCHARGE

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作者：
SVETTSOV, VI
CHESNOKOVA, TA
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来源：
INORGANIC MATERIALS | 1986年 / 22卷 / 11期
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T [工业技术];
学科分类号：
08 ;
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页码：1603 / 1606
页数：4
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