DEPOSITION OF REFRACTORY-METAL FILMS BY RARE-GAS HALIDE LASER PHOTODISSOCIATION OF METAL-CARBONYLS

被引：62
|
作者：
FLYNN, DK
STEINFELD, JI
SETHI, DS
机构：
[1] CONNECTICUT INST TECHNOL,BRIDGEPORT,CT 06601
[2] UNIV BRIDGEPORT,DEPT CHEM,BRIDGEPORT,CT 06602
来源：
JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 11期
关键词：
D O I：
10.1063/1.336736
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：3914 / 3917
页数：4
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