ANALYSIS AND APPLICATION OF SINGLE-ELEMENT ROTATING-POLARIZER (SERP) ELLIPSOMETER - FILM-THICKNESS DETERMINATION

被引：4
|
作者：
ZAGHLOUL, ARM
ELBAHY, MM
ABOUSEADA, MS
机构：
[1] Cairo Univ, Cairo, Egypt, Cairo Univ, Cairo, Egypt
来源：
OPTICS COMMUNICATIONS | 1987年 / 61卷 / 06期
关键词：
LIGHT - Polarization - MATHEMATICAL TECHNIQUES - Error Analysis;
D O I：
10.1016/0030-4018(87)90191-X
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We analyze and discuss an ellipsometer recently introduced in the literature, the single-element rotating-polarizer (SERP) ellipsometer. The case of film thickness determination of a film-substrate system is considered in full detail. An error analysis is presented establishing the very high accuracy of the method. The experimental technique is discussed and measurements are presented.
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页码：363 / 368
页数：6
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